There are two methods by which the Graphite is ‘coated’; CVD (Chemical Vapour Deposition) and CVI (Chemical Vapour Impregnation). These treatments transform the Graphite surface to SiC so the ‘coating’ expands and contracts with the Graphite and therefore largely eliminates cracking and spalling. This leads to longer life and increased durability. These materials were primarily designed for semiconductor production but their use in other industries is actively being researched.

Features:

• Excellent Thermal and Physical Shock Resistance
• Excellent Chemical Resistance
• Super High Purity
• Usable under Oxidising Conditions

Applications:

• Susceptors for Epitaxy
• Susceptors for CVD
• Heaters
• Components for CZ single crystal pullers

Typical Properties of the base material

Note: For the properties and elemental analysis of the SiC layer please refer to SOLID SiC datasheet.